Attention: Proceedings of ICPT2014 is published with a PDF form only by USB flash drive.
Therefore, you need a laptop to read it.

About keynote speeches open for citizen(in Japanese web-site)

Attention: This site is for Int'l Conf. on Positioning Tech.
The website of
Int'l Conf. on Planalization/CMP Technology(ICPT2014) is here.

--Young Researcher Award--

Name Affiliation Title
ORAL Session
Ryuta Sato Kobe University Influence of Type and Size of Coupling on the Motion Characteristics of Ball-screw Drive Feed Drive System
Yindi Cai Tohoku University Development of a six-degree-of-freedom surface encoder
Yen-Chu Teng National Cheng-Kung University Design, Analysis and Control of Elastomeric Bearing Positioning Stage
Seongheum Han Korea Advanced Institute for Science and Technology (KAIST) Precise long distance measurement by synthetic wavelength dual-comb interferometry
POSTER Session
Tadashi Hama Tokyo Institute of Technology Dynamic Characteristics and Precision Control of an Ultrahigh-Acceleration Linear Motor
So Ito Tohoku University Dimensional Measurement of Micro Pinhole by Probing System with a Nanopipette Boll Stylus
Tomonori Kato Fukuoka Institute of Technology Pressure control in balancing cylinder for hybrid electric-pneumatic ultra-precision vertical positioning stage
Takuro Ishino Shizuoka University Sensitivity improvement in three-dimensional touch trigger probe system based on fiber optic displacement sensors

Important Dates

・The deadline of the abstracts is May 31, 2014 -> June 30, 2014.
・Acceptance letters and author's kits for a camera-ready manuscript will be sent by
August 25, 2014.
・Early registration deadline,
September 15, 2014.
・Final camera-ready manuscripts for accepted papers must be sent by
September 25, 2014.

Special thanks to

Sponsored by

Japan Society for Precision Engineering(JSPE)
(Technical Committee of Ultra Precision Positioning, JSPE)

Co-Sponsored by

National Kaohsiung First University of Science and Technology (First Tech)
Korea Institute of Machinery and Materials (KIMM)

Participating Society

Chinese Institute of Automation Engineers (CIAE)
Chinese Automatic Control Society (CACS)
Institute of Electrical Engineering of Japan(IEEJ)
Japan Society of Mechanical Engineers(JSME)
Korean Ministry of Science and Technology(MOST)
Korean Society of Precision Engineering(KSPE)
Society of Instrument and Control Engineers(SICE)
Taiwan Fuzzy Systems Association (TFSA)